5/7/2011	12:36:51 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/7/2011	12:36:52 AM	Recipe started at 12:36 AM
5/7/2011	12:36:52 AM	H2 valve closed
5/7/2011	12:36:52 AM	BCl3 valve closed
5/7/2011	12:36:52 AM	PH3 valve closed
5/7/2011	12:36:52 AM	SiCl4 pre valve closed
5/7/2011	12:36:52 AM	SiCl4 post valve closed
5/7/2011	12:36:52 AM	Main Vac valve closed
5/7/2011	12:36:52 AM	Bypass valve closed
5/7/2011	12:36:52 AM	Bubbler valve closed
5/7/2011	12:36:52 AM	Helium valve opened
5/7/2011	12:36:52 AM	Helium MFC set to  500.000000
5/7/2011	12:36:52 AM	H2 MFC set to  0.000000
5/7/2011	12:36:52 AM	BCl3 MFC set to  0.000000
5/7/2011	12:36:52 AM	PHl3 MFC set to  0.000000
5/7/2011	12:36:52 AM	SiCl4 MFC set to  0.000000
5/7/2011	12:36:52 AM	Bypass solenoid MFC set to  0.000000
5/7/2011	12:36:52 AM	Tube furnace set to 0
5/7/2011	12:38:13 AM	Helium valve closed
5/7/2011	12:38:13 AM	H2 valve closed
5/7/2011	12:38:13 AM	BCl3 valve closed
5/7/2011	12:38:13 AM	PH3 valve closed
5/7/2011	12:38:13 AM	SiCl4 pre valve closed
5/7/2011	12:38:13 AM	SiCl4 post valve closed
5/7/2011	12:38:13 AM	Main Vac valve closed
5/7/2011	12:38:13 AM	Bypass valve closed
5/7/2011	12:38:13 AM	Bubbler valve closed
5/7/2011	12:38:13 AM	Helium MFC set to  0.000000
5/7/2011	12:38:13 AM	H2 MFC set to  0.000000
5/7/2011	12:38:13 AM	BCl3 MFC set to  0.000000
5/7/2011	12:38:13 AM	PHl3 MFC set to  0.000000
5/7/2011	12:38:13 AM	SiCl4 MFC set to  0.000000
5/7/2011	12:38:13 AM	Bypass solenoid MFC set to  0.000000
5/7/2011	12:38:13 AM	Tube furnace set to 0
5/7/2011	12:38:13 AM	Run finished at 12:38 AM
5/7/2011	12:38:13 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/7/2011	12:42:04 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/7/2011	12:42:05 AM	Recipe started at 12:42 AM
5/7/2011	12:42:05 AM	Helium valve closed
5/7/2011	12:42:05 AM	H2 valve closed
5/7/2011	12:42:05 AM	BCl3 valve closed
5/7/2011	12:42:05 AM	PH3 valve closed
5/7/2011	12:42:05 AM	SiCl4 pre valve closed
5/7/2011	12:42:05 AM	SiCl4 post valve closed
5/7/2011	12:42:05 AM	Main Vac valve closed
5/7/2011	12:42:05 AM	Bubbler valve closed
5/7/2011	12:42:05 AM	Bypass valve opened
5/7/2011	12:42:05 AM	Helium MFC set to  0.000000
5/7/2011	12:42:05 AM	H2 MFC set to  0.000000
5/7/2011	12:42:05 AM	BCl3 MFC set to  0.000000
5/7/2011	12:42:05 AM	PHl3 MFC set to  0.000000
5/7/2011	12:42:05 AM	SiCl4 MFC set to  0.000000
5/7/2011	12:42:05 AM	Bypass solenoid MFC set to  0.000000
5/7/2011	12:42:05 AM	Tube furnace set to 0
5/7/2011	12:42:37 AM	Helium valve closed
5/7/2011	12:42:37 AM	H2 valve closed
5/7/2011	12:42:37 AM	BCl3 valve closed
5/7/2011	12:42:37 AM	PH3 valve closed
5/7/2011	12:42:37 AM	SiCl4 pre valve closed
5/7/2011	12:42:37 AM	SiCl4 post valve closed
5/7/2011	12:42:37 AM	Bubbler valve closed
5/7/2011	12:42:37 AM	Main Vac valve opened
5/7/2011	12:42:37 AM	Bypass valve opened
5/7/2011	12:42:37 AM	Helium MFC set to  0.000000
5/7/2011	12:42:37 AM	H2 MFC set to  0.000000
5/7/2011	12:42:37 AM	BCl3 MFC set to  0.000000
5/7/2011	12:42:37 AM	PHl3 MFC set to  0.000000
5/7/2011	12:42:37 AM	SiCl4 MFC set to  0.000000
5/7/2011	12:42:37 AM	Bypass solenoid MFC set to  0.000000
5/7/2011	12:42:37 AM	Tube furnace set to 0
5/7/2011	12:42:37 AM	Run finished at 12:42 AM
5/7/2011	12:42:37 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/7/2011	12:43:02 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/7/2011	12:43:02 AM	Recipe started at 12:43 AM
5/7/2011	12:43:02 AM	Helium valve closed
5/7/2011	12:43:02 AM	H2 valve closed
5/7/2011	12:43:02 AM	BCl3 valve closed
5/7/2011	12:43:02 AM	PH3 valve closed
5/7/2011	12:43:02 AM	SiCl4 pre valve closed
5/7/2011	12:43:02 AM	SiCl4 post valve closed
5/7/2011	12:43:02 AM	Main Vac valve closed
5/7/2011	12:43:02 AM	Bypass valve closed
5/7/2011	12:43:02 AM	Bubbler valve closed
5/7/2011	12:43:02 AM	Helium MFC set to  0.000000
5/7/2011	12:43:02 AM	H2 MFC set to  0.000000
5/7/2011	12:43:02 AM	BCl3 MFC set to  0.000000
5/7/2011	12:43:02 AM	PHl3 MFC set to  0.000000
5/7/2011	12:43:02 AM	SiCl4 MFC set to  0.000000
5/7/2011	12:43:02 AM	Bypass solenoid MFC set to  0.000000
5/7/2011	12:43:02 AM	Tube furnace set to 0
5/7/2011	12:43:03 AM	Run finished at 12:43 AM
5/7/2011	12:43:03 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/7/2011	1:13:52 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/7/2011	1:13:53 AM	Recipe started at 1:13 AM
5/7/2011	1:13:53 AM	H2 valve closed
5/7/2011	1:13:53 AM	BCl3 valve closed
5/7/2011	1:13:53 AM	PH3 valve closed
5/7/2011	1:13:53 AM	SiCl4 pre valve closed
5/7/2011	1:13:53 AM	SiCl4 post valve closed
5/7/2011	1:13:53 AM	Main Vac valve closed
5/7/2011	1:13:53 AM	Bypass valve closed
5/7/2011	1:13:53 AM	Bubbler valve closed
5/7/2011	1:13:53 AM	Helium valve opened
5/7/2011	1:13:53 AM	Helium MFC set to  500.000000
5/7/2011	1:13:53 AM	H2 MFC set to  0.000000
5/7/2011	1:13:53 AM	BCl3 MFC set to  0.000000
5/7/2011	1:13:53 AM	PHl3 MFC set to  0.000000
5/7/2011	1:13:53 AM	SiCl4 MFC set to  0.000000
5/7/2011	1:13:53 AM	Bypass solenoid MFC set to  0.000000
5/7/2011	1:13:53 AM	Tube furnace set to 0
5/7/2011	1:15:50 AM	Helium valve closed
5/7/2011	1:15:50 AM	H2 valve closed
5/7/2011	1:15:50 AM	BCl3 valve closed
5/7/2011	1:15:50 AM	PH3 valve closed
5/7/2011	1:15:50 AM	SiCl4 pre valve closed
5/7/2011	1:15:50 AM	SiCl4 post valve closed
5/7/2011	1:15:50 AM	Main Vac valve closed
5/7/2011	1:15:50 AM	Bypass valve closed
5/7/2011	1:15:50 AM	Bubbler valve closed
5/7/2011	1:15:50 AM	Helium MFC set to  0.000000
5/7/2011	1:15:50 AM	H2 MFC set to  0.000000
5/7/2011	1:15:50 AM	BCl3 MFC set to  0.000000
5/7/2011	1:15:50 AM	PHl3 MFC set to  0.000000
5/7/2011	1:15:50 AM	SiCl4 MFC set to  0.000000
5/7/2011	1:15:50 AM	Bypass solenoid MFC set to  0.000000
5/7/2011	1:15:51 AM	Tube furnace set to 0
5/7/2011	1:15:51 AM	Run finished at 1:15 AM
5/7/2011	1:15:51 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/7/2011	1:23:20 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/7/2011	1:23:20 AM	Recipe started at 1:23 AM
5/7/2011	1:23:20 AM	Helium valve closed
5/7/2011	1:23:20 AM	H2 valve closed
5/7/2011	1:23:20 AM	BCl3 valve closed
5/7/2011	1:23:20 AM	PH3 valve closed
5/7/2011	1:23:20 AM	SiCl4 pre valve closed
5/7/2011	1:23:20 AM	SiCl4 post valve closed
5/7/2011	1:23:20 AM	Main Vac valve closed
5/7/2011	1:23:20 AM	Bubbler valve closed
5/7/2011	1:23:20 AM	Bypass valve opened
5/7/2011	1:23:20 AM	Helium MFC set to  0.000000
5/7/2011	1:23:20 AM	H2 MFC set to  0.000000
5/7/2011	1:23:20 AM	BCl3 MFC set to  0.000000
5/7/2011	1:23:20 AM	PHl3 MFC set to  0.000000
5/7/2011	1:23:20 AM	SiCl4 MFC set to  0.000000
5/7/2011	1:23:20 AM	Bypass solenoid MFC set to  0.000000
5/7/2011	1:23:21 AM	Tube furnace set to 0
5/7/2011	1:23:53 AM	Helium valve closed
5/7/2011	1:23:53 AM	H2 valve closed
5/7/2011	1:23:53 AM	BCl3 valve closed
5/7/2011	1:23:53 AM	PH3 valve closed
5/7/2011	1:23:53 AM	SiCl4 pre valve closed
5/7/2011	1:23:53 AM	SiCl4 post valve closed
5/7/2011	1:23:53 AM	Bubbler valve closed
5/7/2011	1:23:53 AM	Main Vac valve opened
5/7/2011	1:23:53 AM	Bypass valve opened
5/7/2011	1:23:53 AM	Helium MFC set to  0.000000
5/7/2011	1:23:53 AM	H2 MFC set to  0.000000
5/7/2011	1:23:53 AM	BCl3 MFC set to  0.000000
5/7/2011	1:23:53 AM	PHl3 MFC set to  0.000000
5/7/2011	1:23:53 AM	SiCl4 MFC set to  0.000000
5/7/2011	1:23:53 AM	Bypass solenoid MFC set to  0.000000
5/7/2011	1:23:53 AM	Tube furnace set to 0
5/7/2011	1:23:54 AM	Run finished at 1:23 AM
5/7/2011	1:23:54 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/7/2011	1:24:04 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/7/2011	1:24:16 AM	Recipe started at 1:24 AM
5/7/2011	1:24:16 AM	Helium valve closed
5/7/2011	1:24:16 AM	H2 valve closed
5/7/2011	1:24:16 AM	BCl3 valve closed
5/7/2011	1:24:16 AM	PH3 valve closed
5/7/2011	1:24:16 AM	SiCl4 pre valve closed
5/7/2011	1:24:16 AM	SiCl4 post valve closed
5/7/2011	1:24:16 AM	Main Vac valve closed
5/7/2011	1:24:16 AM	Bubbler valve closed
5/7/2011	1:24:16 AM	Bypass valve opened
5/7/2011	1:24:16 AM	Helium MFC set to  0.000000
5/7/2011	1:24:16 AM	H2 MFC set to  0.000000
5/7/2011	1:24:16 AM	BCl3 MFC set to  0.000000
5/7/2011	1:24:16 AM	PHl3 MFC set to  0.000000
5/7/2011	1:24:16 AM	SiCl4 MFC set to  0.000000
5/7/2011	1:24:16 AM	Bypass solenoid MFC set to  0.000000
5/7/2011	1:24:16 AM	Tube furnace set to 0
5/7/2011	1:24:16 AM	Helium valve closed
5/7/2011	1:24:16 AM	H2 valve closed
5/7/2011	1:24:16 AM	BCl3 valve closed
5/7/2011	1:24:16 AM	PH3 valve closed
5/7/2011	1:24:16 AM	SiCl4 pre valve closed
5/7/2011	1:24:16 AM	SiCl4 post valve closed
5/7/2011	1:24:16 AM	Bubbler valve closed
5/7/2011	1:24:16 AM	Main Vac valve opened
5/7/2011	1:24:16 AM	Bypass valve opened
5/7/2011	1:24:16 AM	Helium MFC set to  0.000000
5/7/2011	1:24:16 AM	H2 MFC set to  0.000000
5/7/2011	1:24:16 AM	BCl3 MFC set to  0.000000
5/7/2011	1:24:16 AM	PHl3 MFC set to  0.000000
5/7/2011	1:24:16 AM	SiCl4 MFC set to  0.000000
5/7/2011	1:24:16 AM	Bypass solenoid MFC set to  0.000000
5/7/2011	1:24:17 AM	Tube furnace set to 0
5/7/2011	1:25:17 AM	H2 valve closed
5/7/2011	1:25:17 AM	BCl3 valve closed
5/7/2011	1:25:17 AM	PH3 valve closed
5/7/2011	1:25:17 AM	SiCl4 pre valve closed
5/7/2011	1:25:17 AM	SiCl4 post valve closed
5/7/2011	1:25:17 AM	Bubbler valve closed
5/7/2011	1:25:17 AM	Helium valve opened
5/7/2011	1:25:17 AM	Main Vac valve opened
5/7/2011	1:25:17 AM	Bypass valve opened
5/7/2011	1:25:17 AM	Helium MFC set to  100.000000
5/7/2011	1:25:17 AM	H2 MFC set to  0.000000
5/7/2011	1:25:17 AM	BCl3 MFC set to  0.000000
5/7/2011	1:25:17 AM	PHl3 MFC set to  0.000000
5/7/2011	1:25:17 AM	SiCl4 MFC set to  0.000000
5/7/2011	1:25:17 AM	Bypass solenoid MFC set to  0.000000
5/7/2011	1:25:17 AM	Tube furnace set to 0
5/7/2011	1:26:17 AM	Helium valve closed
5/7/2011	1:26:17 AM	H2 valve closed
5/7/2011	1:26:17 AM	BCl3 valve closed
5/7/2011	1:26:17 AM	PH3 valve closed
5/7/2011	1:26:17 AM	SiCl4 pre valve closed
5/7/2011	1:26:17 AM	SiCl4 post valve closed
5/7/2011	1:26:17 AM	Bubbler valve closed
5/7/2011	1:26:17 AM	Main Vac valve opened
5/7/2011	1:26:17 AM	Bypass valve opened
5/7/2011	1:26:17 AM	Helium MFC set to  0.000000
5/7/2011	1:26:17 AM	H2 MFC set to  0.000000
5/7/2011	1:26:17 AM	BCl3 MFC set to  0.000000
5/7/2011	1:26:17 AM	PHl3 MFC set to  0.000000
5/7/2011	1:26:17 AM	SiCl4 MFC set to  0.000000
5/7/2011	1:26:17 AM	Bypass solenoid MFC set to  0.000000
5/7/2011	1:26:17 AM	Tube furnace set to 0
5/7/2011	1:27:17 AM	H2 valve closed
5/7/2011	1:27:17 AM	BCl3 valve closed
5/7/2011	1:27:17 AM	PH3 valve closed
5/7/2011	1:27:17 AM	SiCl4 pre valve closed
5/7/2011	1:27:17 AM	SiCl4 post valve closed
5/7/2011	1:27:17 AM	Bubbler valve closed
5/7/2011	1:27:17 AM	Helium valve opened
5/7/2011	1:27:17 AM	Main Vac valve opened
5/7/2011	1:27:17 AM	Bypass valve opened
5/7/2011	1:27:17 AM	Helium MFC set to  100.000000
5/7/2011	1:27:17 AM	H2 MFC set to  0.000000
5/7/2011	1:27:17 AM	BCl3 MFC set to  0.000000
5/7/2011	1:27:17 AM	PHl3 MFC set to  0.000000
5/7/2011	1:27:17 AM	SiCl4 MFC set to  0.000000
5/7/2011	1:27:17 AM	Bypass solenoid MFC set to  0.000000
5/7/2011	1:27:17 AM	Tube furnace set to 0
5/7/2011	1:28:17 AM	Helium valve closed
5/7/2011	1:28:17 AM	H2 valve closed
5/7/2011	1:28:17 AM	BCl3 valve closed
5/7/2011	1:28:17 AM	PH3 valve closed
5/7/2011	1:28:17 AM	SiCl4 pre valve closed
5/7/2011	1:28:17 AM	SiCl4 post valve closed
5/7/2011	1:28:17 AM	Bubbler valve closed
5/7/2011	1:28:17 AM	Main Vac valve opened
5/7/2011	1:28:17 AM	Bypass valve opened
5/7/2011	1:28:17 AM	Helium MFC set to  0.000000
5/7/2011	1:28:17 AM	H2 MFC set to  0.000000
5/7/2011	1:28:17 AM	BCl3 MFC set to  0.000000
5/7/2011	1:28:17 AM	PHl3 MFC set to  0.000000
5/7/2011	1:28:17 AM	SiCl4 MFC set to  0.000000
5/7/2011	1:28:17 AM	Bypass solenoid MFC set to  0.000000
5/7/2011	1:28:17 AM	Tube furnace set to 0
5/7/2011	1:29:17 AM	H2 valve closed
5/7/2011	1:29:17 AM	BCl3 valve closed
5/7/2011	1:29:17 AM	PH3 valve closed
5/7/2011	1:29:17 AM	SiCl4 pre valve closed
5/7/2011	1:29:17 AM	SiCl4 post valve closed
5/7/2011	1:29:17 AM	Bubbler valve closed
5/7/2011	1:29:17 AM	Helium valve opened
5/7/2011	1:29:17 AM	Main Vac valve opened
5/7/2011	1:29:17 AM	Bypass valve opened
5/7/2011	1:29:18 AM	Helium MFC set to  100.000000
5/7/2011	1:29:18 AM	H2 MFC set to  0.000000
5/7/2011	1:29:18 AM	BCl3 MFC set to  0.000000
5/7/2011	1:29:18 AM	PHl3 MFC set to  0.000000
5/7/2011	1:29:18 AM	SiCl4 MFC set to  0.000000
5/7/2011	1:29:18 AM	Bypass solenoid MFC set to  0.000000
5/7/2011	1:29:18 AM	Tube furnace set to 0
5/7/2011	1:30:18 AM	Helium valve closed
5/7/2011	1:30:18 AM	H2 valve closed
5/7/2011	1:30:18 AM	BCl3 valve closed
5/7/2011	1:30:18 AM	PH3 valve closed
5/7/2011	1:30:18 AM	SiCl4 pre valve closed
5/7/2011	1:30:18 AM	SiCl4 post valve closed
5/7/2011	1:30:18 AM	Bubbler valve closed
5/7/2011	1:30:18 AM	Main Vac valve opened
5/7/2011	1:30:18 AM	Bypass valve opened
5/7/2011	1:30:18 AM	Helium MFC set to  0.000000
5/7/2011	1:30:18 AM	H2 MFC set to  0.000000
5/7/2011	1:30:18 AM	BCl3 MFC set to  0.000000
5/7/2011	1:30:18 AM	PHl3 MFC set to  0.000000
5/7/2011	1:30:18 AM	SiCl4 MFC set to  0.000000
5/7/2011	1:30:18 AM	Bypass solenoid MFC set to  0.000000
5/7/2011	1:30:18 AM	Tube furnace set to 0
5/7/2011	1:31:18 AM	H2 valve closed
5/7/2011	1:31:18 AM	BCl3 valve closed
5/7/2011	1:31:18 AM	PH3 valve closed
5/7/2011	1:31:18 AM	SiCl4 pre valve closed
5/7/2011	1:31:18 AM	SiCl4 post valve closed
5/7/2011	1:31:18 AM	Bubbler valve closed
5/7/2011	1:31:18 AM	Helium valve opened
5/7/2011	1:31:18 AM	Main Vac valve opened
5/7/2011	1:31:18 AM	Bypass valve opened
5/7/2011	1:31:18 AM	Helium MFC set to  100.000000
5/7/2011	1:31:18 AM	H2 MFC set to  0.000000
5/7/2011	1:31:18 AM	BCl3 MFC set to  0.000000
5/7/2011	1:31:18 AM	PHl3 MFC set to  0.000000
5/7/2011	1:31:18 AM	SiCl4 MFC set to  0.000000
5/7/2011	1:31:18 AM	Bypass solenoid MFC set to  0.000000
5/7/2011	1:31:18 AM	Tube furnace set to 0
5/7/2011	1:32:18 AM	Helium valve closed
5/7/2011	1:32:18 AM	H2 valve closed
5/7/2011	1:32:18 AM	BCl3 valve closed
5/7/2011	1:32:18 AM	PH3 valve closed
5/7/2011	1:32:18 AM	SiCl4 pre valve closed
5/7/2011	1:32:18 AM	SiCl4 post valve closed
5/7/2011	1:32:18 AM	Bubbler valve closed
5/7/2011	1:32:18 AM	Main Vac valve opened
5/7/2011	1:32:18 AM	Bypass valve opened
5/7/2011	1:32:18 AM	Helium MFC set to  0.000000
5/7/2011	1:32:18 AM	H2 MFC set to  0.000000
5/7/2011	1:32:18 AM	BCl3 MFC set to  0.000000
5/7/2011	1:32:18 AM	PHl3 MFC set to  0.000000
5/7/2011	1:32:18 AM	SiCl4 MFC set to  0.000000
5/7/2011	1:32:18 AM	Bypass solenoid MFC set to  0.000000
5/7/2011	1:32:18 AM	Tube furnace set to 0
5/7/2011	1:33:18 AM	H2 valve closed
5/7/2011	1:33:18 AM	BCl3 valve closed
5/7/2011	1:33:18 AM	PH3 valve closed
5/7/2011	1:33:18 AM	SiCl4 pre valve closed
5/7/2011	1:33:18 AM	SiCl4 post valve closed
5/7/2011	1:33:18 AM	Bubbler valve closed
5/7/2011	1:33:18 AM	Helium valve opened
5/7/2011	1:33:18 AM	Main Vac valve opened
5/7/2011	1:33:18 AM	Bypass valve opened
5/7/2011	1:33:18 AM	Helium MFC set to  100.000000
5/7/2011	1:33:18 AM	H2 MFC set to  0.000000
5/7/2011	1:33:18 AM	BCl3 MFC set to  0.000000
5/7/2011	1:33:18 AM	PHl3 MFC set to  0.000000
5/7/2011	1:33:18 AM	SiCl4 MFC set to  0.000000
5/7/2011	1:33:18 AM	Bypass solenoid MFC set to  0.000000
5/7/2011	1:33:18 AM	Tube furnace set to 0
5/7/2011	1:34:19 AM	Helium valve closed
5/7/2011	1:34:19 AM	H2 valve closed
5/7/2011	1:34:19 AM	BCl3 valve closed
5/7/2011	1:34:19 AM	PH3 valve closed
5/7/2011	1:34:19 AM	SiCl4 pre valve closed
5/7/2011	1:34:19 AM	SiCl4 post valve closed
5/7/2011	1:34:19 AM	Bubbler valve closed
5/7/2011	1:34:19 AM	Main Vac valve opened
5/7/2011	1:34:19 AM	Bypass valve opened
5/7/2011	1:34:19 AM	Helium MFC set to  0.000000
5/7/2011	1:34:19 AM	H2 MFC set to  0.000000
5/7/2011	1:34:19 AM	BCl3 MFC set to  0.000000
5/7/2011	1:34:19 AM	PHl3 MFC set to  0.000000
5/7/2011	1:34:19 AM	SiCl4 MFC set to  0.000000
5/7/2011	1:34:19 AM	Bypass solenoid MFC set to  0.000000
5/7/2011	1:34:19 AM	Tube furnace set to 0
5/7/2011	1:35:19 AM	H2 valve closed
5/7/2011	1:35:19 AM	BCl3 valve closed
5/7/2011	1:35:19 AM	PH3 valve closed
5/7/2011	1:35:19 AM	SiCl4 pre valve closed
5/7/2011	1:35:19 AM	SiCl4 post valve closed
5/7/2011	1:35:19 AM	Bubbler valve closed
5/7/2011	1:35:19 AM	Helium valve opened
5/7/2011	1:35:19 AM	Main Vac valve opened
5/7/2011	1:35:19 AM	Bypass valve opened
5/7/2011	1:35:19 AM	Helium MFC set to  100.000000
5/7/2011	1:35:19 AM	H2 MFC set to  0.000000
5/7/2011	1:35:19 AM	BCl3 MFC set to  0.000000
5/7/2011	1:35:19 AM	PHl3 MFC set to  0.000000
5/7/2011	1:35:19 AM	SiCl4 MFC set to  0.000000
5/7/2011	1:35:19 AM	Bypass solenoid MFC set to  0.000000
5/7/2011	1:35:19 AM	Tube furnace set to 0
5/7/2011	1:36:19 AM	Helium valve closed
5/7/2011	1:36:19 AM	H2 valve closed
5/7/2011	1:36:19 AM	BCl3 valve closed
5/7/2011	1:36:19 AM	PH3 valve closed
5/7/2011	1:36:19 AM	SiCl4 pre valve closed
5/7/2011	1:36:19 AM	SiCl4 post valve closed
5/7/2011	1:36:19 AM	Bubbler valve closed
5/7/2011	1:36:19 AM	Main Vac valve opened
5/7/2011	1:36:19 AM	Bypass valve opened
5/7/2011	1:36:19 AM	Helium MFC set to  0.000000
5/7/2011	1:36:19 AM	H2 MFC set to  0.000000
5/7/2011	1:36:19 AM	BCl3 MFC set to  0.000000
5/7/2011	1:36:19 AM	PHl3 MFC set to  0.000000
5/7/2011	1:36:19 AM	SiCl4 MFC set to  0.000000
5/7/2011	1:36:19 AM	Bypass solenoid MFC set to  0.000000
5/7/2011	1:36:19 AM	Tube furnace set to 0
5/7/2011	1:37:19 AM	H2 valve closed
5/7/2011	1:37:19 AM	BCl3 valve closed
5/7/2011	1:37:19 AM	PH3 valve closed
5/7/2011	1:37:19 AM	SiCl4 pre valve closed
5/7/2011	1:37:19 AM	SiCl4 post valve closed
5/7/2011	1:37:19 AM	Bubbler valve closed
5/7/2011	1:37:19 AM	Helium valve opened
5/7/2011	1:37:19 AM	Main Vac valve opened
5/7/2011	1:37:19 AM	Bypass valve opened
5/7/2011	1:37:19 AM	Helium MFC set to  100.000000
5/7/2011	1:37:19 AM	H2 MFC set to  0.000000
5/7/2011	1:37:19 AM	BCl3 MFC set to  0.000000
5/7/2011	1:37:19 AM	PHl3 MFC set to  0.000000
5/7/2011	1:37:19 AM	SiCl4 MFC set to  0.000000
5/7/2011	1:37:19 AM	Bypass solenoid MFC set to  0.000000
5/7/2011	1:37:19 AM	Tube furnace set to 0
5/7/2011	1:38:19 AM	Helium valve closed
5/7/2011	1:38:19 AM	H2 valve closed
5/7/2011	1:38:19 AM	BCl3 valve closed
5/7/2011	1:38:19 AM	PH3 valve closed
5/7/2011	1:38:19 AM	SiCl4 pre valve closed
5/7/2011	1:38:19 AM	SiCl4 post valve closed
5/7/2011	1:38:19 AM	Bubbler valve closed
5/7/2011	1:38:19 AM	Main Vac valve opened
5/7/2011	1:38:19 AM	Bypass valve opened
5/7/2011	1:38:19 AM	Helium MFC set to  0.000000
5/7/2011	1:38:19 AM	H2 MFC set to  0.000000
5/7/2011	1:38:19 AM	BCl3 MFC set to  0.000000
5/7/2011	1:38:19 AM	PHl3 MFC set to  0.000000
5/7/2011	1:38:19 AM	SiCl4 MFC set to  0.000000
5/7/2011	1:38:19 AM	Bypass solenoid MFC set to  0.000000
5/7/2011	1:38:19 AM	Tube furnace set to 0
5/7/2011	1:39:20 AM	H2 valve closed
5/7/2011	1:39:20 AM	BCl3 valve closed
5/7/2011	1:39:20 AM	PH3 valve closed
5/7/2011	1:39:20 AM	SiCl4 pre valve closed
5/7/2011	1:39:20 AM	SiCl4 post valve closed
5/7/2011	1:39:20 AM	Bubbler valve closed
5/7/2011	1:39:20 AM	Helium valve opened
5/7/2011	1:39:20 AM	Main Vac valve opened
5/7/2011	1:39:20 AM	Bypass valve opened
5/7/2011	1:39:20 AM	Helium MFC set to  100.000000
5/7/2011	1:39:20 AM	H2 MFC set to  0.000000
5/7/2011	1:39:20 AM	BCl3 MFC set to  0.000000
5/7/2011	1:39:20 AM	PHl3 MFC set to  0.000000
5/7/2011	1:39:20 AM	SiCl4 MFC set to  0.000000
5/7/2011	1:39:20 AM	Bypass solenoid MFC set to  0.000000
5/7/2011	1:39:20 AM	Tube furnace set to 0
5/7/2011	1:40:20 AM	Helium valve closed
5/7/2011	1:40:20 AM	H2 valve closed
5/7/2011	1:40:20 AM	BCl3 valve closed
5/7/2011	1:40:20 AM	PH3 valve closed
5/7/2011	1:40:20 AM	SiCl4 pre valve closed
5/7/2011	1:40:20 AM	SiCl4 post valve closed
5/7/2011	1:40:20 AM	Bubbler valve closed
5/7/2011	1:40:20 AM	Main Vac valve opened
5/7/2011	1:40:20 AM	Bypass valve opened
5/7/2011	1:40:20 AM	Helium MFC set to  0.000000
5/7/2011	1:40:20 AM	H2 MFC set to  0.000000
5/7/2011	1:40:20 AM	BCl3 MFC set to  0.000000
5/7/2011	1:40:20 AM	PHl3 MFC set to  0.000000
5/7/2011	1:40:20 AM	SiCl4 MFC set to  0.000000
5/7/2011	1:40:20 AM	Bypass solenoid MFC set to  0.000000
5/7/2011	1:40:20 AM	Tube furnace set to 0
5/7/2011	1:41:20 AM	H2 valve closed
5/7/2011	1:41:20 AM	BCl3 valve closed
5/7/2011	1:41:20 AM	PH3 valve closed
5/7/2011	1:41:20 AM	SiCl4 pre valve closed
5/7/2011	1:41:20 AM	SiCl4 post valve closed
5/7/2011	1:41:20 AM	Bubbler valve closed
5/7/2011	1:41:20 AM	Helium valve opened
5/7/2011	1:41:20 AM	Main Vac valve opened
5/7/2011	1:41:20 AM	Bypass valve opened
5/7/2011	1:41:20 AM	Helium MFC set to  100.000000
5/7/2011	1:41:20 AM	H2 MFC set to  0.000000
5/7/2011	1:41:20 AM	BCl3 MFC set to  0.000000
5/7/2011	1:41:20 AM	PHl3 MFC set to  0.000000
5/7/2011	1:41:20 AM	SiCl4 MFC set to  0.000000
5/7/2011	1:41:20 AM	Bypass solenoid MFC set to  0.000000
5/7/2011	1:41:20 AM	Tube furnace set to 0
5/7/2011	1:42:20 AM	Helium valve closed
5/7/2011	1:42:20 AM	H2 valve closed
5/7/2011	1:42:20 AM	BCl3 valve closed
5/7/2011	1:42:20 AM	PH3 valve closed
5/7/2011	1:42:20 AM	SiCl4 pre valve closed
5/7/2011	1:42:20 AM	SiCl4 post valve closed
5/7/2011	1:42:20 AM	Bubbler valve closed
5/7/2011	1:42:20 AM	Main Vac valve opened
5/7/2011	1:42:20 AM	Bypass valve opened
5/7/2011	1:42:20 AM	Helium MFC set to  0.000000
5/7/2011	1:42:20 AM	H2 MFC set to  0.000000
5/7/2011	1:42:20 AM	BCl3 MFC set to  0.000000
5/7/2011	1:42:20 AM	PHl3 MFC set to  0.000000
5/7/2011	1:42:20 AM	SiCl4 MFC set to  0.000000
5/7/2011	1:42:20 AM	Bypass solenoid MFC set to  0.000000
5/7/2011	1:42:20 AM	Tube furnace set to 0
5/7/2011	1:43:20 AM	H2 valve closed
5/7/2011	1:43:20 AM	BCl3 valve closed
5/7/2011	1:43:20 AM	PH3 valve closed
5/7/2011	1:43:20 AM	SiCl4 pre valve closed
5/7/2011	1:43:20 AM	SiCl4 post valve closed
5/7/2011	1:43:20 AM	Bubbler valve closed
5/7/2011	1:43:20 AM	Helium valve opened
5/7/2011	1:43:20 AM	Main Vac valve opened
5/7/2011	1:43:20 AM	Bypass valve opened
5/7/2011	1:43:20 AM	Helium MFC set to  100.000000
5/7/2011	1:43:20 AM	H2 MFC set to  0.000000
5/7/2011	1:43:20 AM	BCl3 MFC set to  0.000000
5/7/2011	1:43:20 AM	PHl3 MFC set to  0.000000
5/7/2011	1:43:20 AM	SiCl4 MFC set to  0.000000
5/7/2011	1:43:20 AM	Bypass solenoid MFC set to  0.000000
5/7/2011	1:43:21 AM	Tube furnace set to 0
5/7/2011	1:44:21 AM	Helium valve closed
5/7/2011	1:44:21 AM	H2 valve closed
5/7/2011	1:44:21 AM	BCl3 valve closed
5/7/2011	1:44:21 AM	PH3 valve closed
5/7/2011	1:44:21 AM	SiCl4 pre valve closed
5/7/2011	1:44:21 AM	SiCl4 post valve closed
5/7/2011	1:44:21 AM	Bubbler valve closed
5/7/2011	1:44:21 AM	Main Vac valve opened
5/7/2011	1:44:21 AM	Bypass valve opened
5/7/2011	1:44:21 AM	Helium MFC set to  0.000000
5/7/2011	1:44:21 AM	H2 MFC set to  0.000000
5/7/2011	1:44:21 AM	BCl3 MFC set to  0.000000
5/7/2011	1:44:21 AM	PHl3 MFC set to  0.000000
5/7/2011	1:44:21 AM	SiCl4 MFC set to  0.000000
5/7/2011	1:44:21 AM	Bypass solenoid MFC set to  0.000000
5/7/2011	1:44:21 AM	Tube furnace set to 0
5/7/2011	1:44:22 AM	Run finished at 1:44 AM
5/7/2011	1:44:22 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/7/2011	1:51:34 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/7/2011	1:51:34 AM	Recipe started at 1:51 AM
5/7/2011	1:51:34 AM	Helium valve closed
5/7/2011	1:51:34 AM	H2 valve closed
5/7/2011	1:51:34 AM	BCl3 valve closed
5/7/2011	1:51:34 AM	PH3 valve closed
5/7/2011	1:51:34 AM	SiCl4 pre valve closed
5/7/2011	1:51:34 AM	SiCl4 post valve closed
5/7/2011	1:51:34 AM	Main Vac valve closed
5/7/2011	1:51:34 AM	Bypass valve closed
5/7/2011	1:51:34 AM	Bubbler valve closed
5/7/2011	1:51:34 AM	Helium MFC set to  0.000000
5/7/2011	1:51:34 AM	H2 MFC set to  0.000000
5/7/2011	1:51:34 AM	BCl3 MFC set to  0.000000
5/7/2011	1:51:34 AM	PHl3 MFC set to  0.000000
5/7/2011	1:51:34 AM	SiCl4 MFC set to  0.000000
5/7/2011	1:51:34 AM	Bypass solenoid MFC set to  0.000000
5/7/2011	1:51:34 AM	Tube furnace set to 0
5/7/2011	1:51:35 AM	Run finished at 1:51 AM
5/7/2011	1:51:35 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/7/2011	9:29:11 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/7/2011	9:29:12 AM	Recipe started at 9:29 AM
5/7/2011	9:29:12 AM	Helium valve closed
5/7/2011	9:29:12 AM	H2 valve closed
5/7/2011	9:29:12 AM	BCl3 valve closed
5/7/2011	9:29:12 AM	PH3 valve closed
5/7/2011	9:29:12 AM	SiCl4 pre valve closed
5/7/2011	9:29:12 AM	SiCl4 post valve closed
5/7/2011	9:29:12 AM	Main Vac valve closed
5/7/2011	9:29:12 AM	Bubbler valve closed
5/7/2011	9:29:12 AM	Bypass valve opened
5/7/2011	9:29:12 AM	Helium MFC set to  0.000000
5/7/2011	9:29:12 AM	H2 MFC set to  0.000000
5/7/2011	9:29:12 AM	BCl3 MFC set to  0.000000
5/7/2011	9:29:12 AM	PHl3 MFC set to  0.000000
5/7/2011	9:29:12 AM	SiCl4 MFC set to  0.000000
5/7/2011	9:29:12 AM	Bypass solenoid MFC set to  0.000000
5/7/2011	9:29:12 AM	Tube furnace set to 0
5/7/2011	9:29:12 AM	Helium valve closed
5/7/2011	9:29:12 AM	H2 valve closed
5/7/2011	9:29:12 AM	BCl3 valve closed
5/7/2011	9:29:12 AM	PH3 valve closed
5/7/2011	9:29:12 AM	SiCl4 pre valve closed
5/7/2011	9:29:12 AM	SiCl4 post valve closed
5/7/2011	9:29:12 AM	Bubbler valve closed
5/7/2011	9:29:12 AM	Main Vac valve opened
5/7/2011	9:29:12 AM	Bypass valve opened
5/7/2011	9:29:12 AM	Helium MFC set to  0.000000
5/7/2011	9:29:12 AM	H2 MFC set to  0.000000
5/7/2011	9:29:12 AM	BCl3 MFC set to  0.000000
5/7/2011	9:29:12 AM	PHl3 MFC set to  0.000000
5/7/2011	9:29:12 AM	SiCl4 MFC set to  0.000000
5/7/2011	9:29:12 AM	Bypass solenoid MFC set to  0.000000
5/7/2011	9:29:13 AM	Tube furnace set to 0
5/7/2011	9:29:13 AM	Run finished at 9:29 AM
5/7/2011	9:29:13 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/7/2011	9:30:32 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/7/2011	9:30:44 AM	Recipe started at 9:30 AM
5/7/2011	9:30:44 AM	Helium valve closed
5/7/2011	9:30:44 AM	H2 valve closed
5/7/2011	9:30:44 AM	BCl3 valve closed
5/7/2011	9:30:44 AM	PH3 valve closed
5/7/2011	9:30:44 AM	SiCl4 pre valve closed
5/7/2011	9:30:44 AM	SiCl4 post valve closed
5/7/2011	9:30:44 AM	Main Vac valve closed
5/7/2011	9:30:44 AM	Bubbler valve closed
5/7/2011	9:30:44 AM	Bypass valve opened
5/7/2011	9:30:44 AM	Helium MFC set to  0.000000
5/7/2011	9:30:44 AM	H2 MFC set to  0.000000
5/7/2011	9:30:44 AM	BCl3 MFC set to  0.000000
5/7/2011	9:30:44 AM	PHl3 MFC set to  0.000000
5/7/2011	9:30:44 AM	SiCl4 MFC set to  0.000000
5/7/2011	9:30:44 AM	Bypass solenoid MFC set to  0.000000
5/7/2011	9:30:44 AM	Tube furnace set to 0
5/7/2011	9:30:44 AM	Helium valve closed
5/7/2011	9:30:44 AM	H2 valve closed
5/7/2011	9:30:44 AM	BCl3 valve closed
5/7/2011	9:30:44 AM	PH3 valve closed
5/7/2011	9:30:44 AM	SiCl4 pre valve closed
5/7/2011	9:30:44 AM	SiCl4 post valve closed
5/7/2011	9:30:44 AM	Bubbler valve closed
5/7/2011	9:30:44 AM	Main Vac valve opened
5/7/2011	9:30:44 AM	Bypass valve opened
5/7/2011	9:30:44 AM	Helium MFC set to  0.000000
5/7/2011	9:30:44 AM	H2 MFC set to  0.000000
5/7/2011	9:30:44 AM	BCl3 MFC set to  0.000000
5/7/2011	9:30:44 AM	PHl3 MFC set to  0.000000
5/7/2011	9:30:44 AM	SiCl4 MFC set to  0.000000
5/7/2011	9:30:44 AM	Bypass solenoid MFC set to  0.000000
5/7/2011	9:30:44 AM	Tube furnace set to 0
5/7/2011	9:31:44 AM	H2 valve closed
5/7/2011	9:31:44 AM	BCl3 valve closed
5/7/2011	9:31:44 AM	PH3 valve closed
5/7/2011	9:31:44 AM	SiCl4 pre valve closed
5/7/2011	9:31:44 AM	SiCl4 post valve closed
5/7/2011	9:31:44 AM	Bubbler valve closed
5/7/2011	9:31:44 AM	Helium valve opened
5/7/2011	9:31:44 AM	Main Vac valve opened
5/7/2011	9:31:44 AM	Bypass valve opened
5/7/2011	9:31:44 AM	Helium MFC set to  100.000000
5/7/2011	9:31:44 AM	H2 MFC set to  0.000000
5/7/2011	9:31:44 AM	BCl3 MFC set to  0.000000
5/7/2011	9:31:44 AM	PHl3 MFC set to  0.000000
5/7/2011	9:31:44 AM	SiCl4 MFC set to  0.000000
5/7/2011	9:31:44 AM	Bypass solenoid MFC set to  0.000000
5/7/2011	9:31:45 AM	Tube furnace set to 0
5/7/2011	9:32:45 AM	Helium valve closed
5/7/2011	9:32:45 AM	H2 valve closed
5/7/2011	9:32:45 AM	BCl3 valve closed
5/7/2011	9:32:45 AM	PH3 valve closed
5/7/2011	9:32:45 AM	SiCl4 pre valve closed
5/7/2011	9:32:45 AM	SiCl4 post valve closed
5/7/2011	9:32:45 AM	Bubbler valve closed
5/7/2011	9:32:45 AM	Main Vac valve opened
5/7/2011	9:32:45 AM	Bypass valve opened
5/7/2011	9:32:45 AM	Helium MFC set to  0.000000
5/7/2011	9:32:45 AM	H2 MFC set to  0.000000
5/7/2011	9:32:45 AM	BCl3 MFC set to  0.000000
5/7/2011	9:32:45 AM	PHl3 MFC set to  0.000000
5/7/2011	9:32:45 AM	SiCl4 MFC set to  0.000000
5/7/2011	9:32:45 AM	Bypass solenoid MFC set to  0.000000
5/7/2011	9:32:45 AM	Tube furnace set to 0
5/7/2011	9:33:45 AM	H2 valve closed
5/7/2011	9:33:45 AM	BCl3 valve closed
5/7/2011	9:33:45 AM	PH3 valve closed
5/7/2011	9:33:45 AM	SiCl4 pre valve closed
5/7/2011	9:33:45 AM	SiCl4 post valve closed
5/7/2011	9:33:45 AM	Bubbler valve closed
5/7/2011	9:33:45 AM	Helium valve opened
5/7/2011	9:33:45 AM	Main Vac valve opened
5/7/2011	9:33:45 AM	Bypass valve opened
5/7/2011	9:33:45 AM	Helium MFC set to  100.000000
5/7/2011	9:33:45 AM	H2 MFC set to  0.000000
5/7/2011	9:33:45 AM	BCl3 MFC set to  0.000000
5/7/2011	9:33:45 AM	PHl3 MFC set to  0.000000
5/7/2011	9:33:45 AM	SiCl4 MFC set to  0.000000
5/7/2011	9:33:45 AM	Bypass solenoid MFC set to  0.000000
5/7/2011	9:33:45 AM	Tube furnace set to 0
5/7/2011	9:34:45 AM	Helium valve closed
5/7/2011	9:34:45 AM	H2 valve closed
5/7/2011	9:34:45 AM	BCl3 valve closed
5/7/2011	9:34:45 AM	PH3 valve closed
5/7/2011	9:34:45 AM	SiCl4 pre valve closed
5/7/2011	9:34:45 AM	SiCl4 post valve closed
5/7/2011	9:34:45 AM	Bubbler valve closed
5/7/2011	9:34:45 AM	Main Vac valve opened
5/7/2011	9:34:45 AM	Bypass valve opened
5/7/2011	9:34:45 AM	Helium MFC set to  0.000000
5/7/2011	9:34:45 AM	H2 MFC set to  0.000000
5/7/2011	9:34:45 AM	BCl3 MFC set to  0.000000
5/7/2011	9:34:45 AM	PHl3 MFC set to  0.000000
5/7/2011	9:34:45 AM	SiCl4 MFC set to  0.000000
5/7/2011	9:34:45 AM	Bypass solenoid MFC set to  0.000000
5/7/2011	9:34:45 AM	Tube furnace set to 0
5/7/2011	9:35:45 AM	H2 valve closed
5/7/2011	9:35:45 AM	BCl3 valve closed
5/7/2011	9:35:45 AM	PH3 valve closed
5/7/2011	9:35:45 AM	SiCl4 pre valve closed
5/7/2011	9:35:45 AM	SiCl4 post valve closed
5/7/2011	9:35:45 AM	Bubbler valve closed
5/7/2011	9:35:45 AM	Helium valve opened
5/7/2011	9:35:45 AM	Main Vac valve opened
5/7/2011	9:35:45 AM	Bypass valve opened
5/7/2011	9:35:45 AM	Helium MFC set to  100.000000
5/7/2011	9:35:45 AM	H2 MFC set to  0.000000
5/7/2011	9:35:45 AM	BCl3 MFC set to  0.000000
5/7/2011	9:35:45 AM	PHl3 MFC set to  0.000000
5/7/2011	9:35:45 AM	SiCl4 MFC set to  0.000000
5/7/2011	9:35:45 AM	Bypass solenoid MFC set to  0.000000
5/7/2011	9:35:45 AM	Tube furnace set to 0
5/7/2011	9:36:45 AM	Helium valve closed
5/7/2011	9:36:45 AM	H2 valve closed
5/7/2011	9:36:45 AM	BCl3 valve closed
5/7/2011	9:36:45 AM	PH3 valve closed
5/7/2011	9:36:45 AM	SiCl4 pre valve closed
5/7/2011	9:36:45 AM	SiCl4 post valve closed
5/7/2011	9:36:45 AM	Bubbler valve closed
5/7/2011	9:36:45 AM	Main Vac valve opened
5/7/2011	9:36:45 AM	Bypass valve opened
5/7/2011	9:36:45 AM	Helium MFC set to  0.000000
5/7/2011	9:36:45 AM	H2 MFC set to  0.000000
5/7/2011	9:36:45 AM	BCl3 MFC set to  0.000000
5/7/2011	9:36:46 AM	PHl3 MFC set to  0.000000
5/7/2011	9:36:46 AM	SiCl4 MFC set to  0.000000
5/7/2011	9:36:46 AM	Bypass solenoid MFC set to  0.000000
5/7/2011	9:36:46 AM	Tube furnace set to 0
5/7/2011	9:37:46 AM	H2 valve closed
5/7/2011	9:37:46 AM	BCl3 valve closed
5/7/2011	9:37:46 AM	PH3 valve closed
5/7/2011	9:37:46 AM	SiCl4 pre valve closed
5/7/2011	9:37:46 AM	SiCl4 post valve closed
5/7/2011	9:37:46 AM	Bubbler valve closed
5/7/2011	9:37:46 AM	Helium valve opened
5/7/2011	9:37:46 AM	Main Vac valve opened
5/7/2011	9:37:46 AM	Bypass valve opened
5/7/2011	9:37:46 AM	Helium MFC set to  100.000000
5/7/2011	9:37:46 AM	H2 MFC set to  0.000000
5/7/2011	9:37:46 AM	BCl3 MFC set to  0.000000
5/7/2011	9:37:46 AM	PHl3 MFC set to  0.000000
5/7/2011	9:37:46 AM	SiCl4 MFC set to  0.000000
5/7/2011	9:37:46 AM	Bypass solenoid MFC set to  0.000000
5/7/2011	9:37:46 AM	Tube furnace set to 0
5/7/2011	9:38:46 AM	Helium valve closed
5/7/2011	9:38:46 AM	H2 valve closed
5/7/2011	9:38:46 AM	BCl3 valve closed
5/7/2011	9:38:46 AM	PH3 valve closed
5/7/2011	9:38:46 AM	SiCl4 pre valve closed
5/7/2011	9:38:46 AM	SiCl4 post valve closed
5/7/2011	9:38:46 AM	Bubbler valve closed
5/7/2011	9:38:46 AM	Main Vac valve opened
5/7/2011	9:38:46 AM	Bypass valve opened
5/7/2011	9:38:46 AM	Helium MFC set to  0.000000
5/7/2011	9:38:46 AM	H2 MFC set to  0.000000
5/7/2011	9:38:46 AM	BCl3 MFC set to  0.000000
5/7/2011	9:38:46 AM	PHl3 MFC set to  0.000000
5/7/2011	9:38:46 AM	SiCl4 MFC set to  0.000000
5/7/2011	9:38:46 AM	Bypass solenoid MFC set to  0.000000
5/7/2011	9:38:46 AM	Tube furnace set to 0
5/7/2011	9:39:46 AM	H2 valve closed
5/7/2011	9:39:46 AM	BCl3 valve closed
5/7/2011	9:39:46 AM	PH3 valve closed
5/7/2011	9:39:46 AM	SiCl4 pre valve closed
5/7/2011	9:39:46 AM	SiCl4 post valve closed
5/7/2011	9:39:46 AM	Bubbler valve closed
5/7/2011	9:39:46 AM	Helium valve opened
5/7/2011	9:39:46 AM	Main Vac valve opened
5/7/2011	9:39:46 AM	Bypass valve opened
5/7/2011	9:39:46 AM	Helium MFC set to  100.000000
5/7/2011	9:39:46 AM	H2 MFC set to  0.000000
5/7/2011	9:39:46 AM	BCl3 MFC set to  0.000000
5/7/2011	9:39:46 AM	PHl3 MFC set to  0.000000
5/7/2011	9:39:46 AM	SiCl4 MFC set to  0.000000
5/7/2011	9:39:46 AM	Bypass solenoid MFC set to  0.000000
5/7/2011	9:39:46 AM	Tube furnace set to 0
5/7/2011	9:40:46 AM	Helium valve closed
5/7/2011	9:40:46 AM	H2 valve closed
5/7/2011	9:40:46 AM	BCl3 valve closed
5/7/2011	9:40:46 AM	PH3 valve closed
5/7/2011	9:40:46 AM	SiCl4 pre valve closed
5/7/2011	9:40:46 AM	SiCl4 post valve closed
5/7/2011	9:40:46 AM	Bubbler valve closed
5/7/2011	9:40:46 AM	Main Vac valve opened
5/7/2011	9:40:46 AM	Bypass valve opened
5/7/2011	9:40:46 AM	Helium MFC set to  0.000000
5/7/2011	9:40:46 AM	H2 MFC set to  0.000000
5/7/2011	9:40:46 AM	BCl3 MFC set to  0.000000
5/7/2011	9:40:46 AM	PHl3 MFC set to  0.000000
5/7/2011	9:40:46 AM	SiCl4 MFC set to  0.000000
5/7/2011	9:40:46 AM	Bypass solenoid MFC set to  0.000000
5/7/2011	9:40:46 AM	Tube furnace set to 0
5/7/2011	9:41:46 AM	H2 valve closed
5/7/2011	9:41:46 AM	BCl3 valve closed
5/7/2011	9:41:46 AM	PH3 valve closed
5/7/2011	9:41:46 AM	SiCl4 pre valve closed
5/7/2011	9:41:46 AM	SiCl4 post valve closed
5/7/2011	9:41:46 AM	Bubbler valve closed
5/7/2011	9:41:46 AM	Helium valve opened
5/7/2011	9:41:47 AM	Main Vac valve opened
5/7/2011	9:41:47 AM	Bypass valve opened
5/7/2011	9:41:47 AM	Helium MFC set to  100.000000
5/7/2011	9:41:47 AM	H2 MFC set to  0.000000
5/7/2011	9:41:47 AM	BCl3 MFC set to  0.000000
5/7/2011	9:41:47 AM	PHl3 MFC set to  0.000000
5/7/2011	9:41:47 AM	SiCl4 MFC set to  0.000000
5/7/2011	9:41:47 AM	Bypass solenoid MFC set to  0.000000
5/7/2011	9:41:47 AM	Tube furnace set to 0
5/7/2011	9:42:47 AM	Helium valve closed
5/7/2011	9:42:47 AM	H2 valve closed
5/7/2011	9:42:47 AM	BCl3 valve closed
5/7/2011	9:42:47 AM	PH3 valve closed
5/7/2011	9:42:47 AM	SiCl4 pre valve closed
5/7/2011	9:42:47 AM	SiCl4 post valve closed
5/7/2011	9:42:47 AM	Bubbler valve closed
5/7/2011	9:42:47 AM	Main Vac valve opened
5/7/2011	9:42:47 AM	Bypass valve opened
5/7/2011	9:42:47 AM	Helium MFC set to  0.000000
5/7/2011	9:42:47 AM	H2 MFC set to  0.000000
5/7/2011	9:42:47 AM	BCl3 MFC set to  0.000000
5/7/2011	9:42:47 AM	PHl3 MFC set to  0.000000
5/7/2011	9:42:47 AM	SiCl4 MFC set to  0.000000
5/7/2011	9:42:47 AM	Bypass solenoid MFC set to  0.000000
5/7/2011	9:42:47 AM	Tube furnace set to 0
5/7/2011	9:43:47 AM	H2 valve closed
5/7/2011	9:43:47 AM	BCl3 valve closed
5/7/2011	9:43:47 AM	PH3 valve closed
5/7/2011	9:43:47 AM	SiCl4 pre valve closed
5/7/2011	9:43:47 AM	SiCl4 post valve closed
5/7/2011	9:43:47 AM	Bubbler valve closed
5/7/2011	9:43:47 AM	Helium valve opened
5/7/2011	9:43:47 AM	Main Vac valve opened
5/7/2011	9:43:47 AM	Bypass valve opened
5/7/2011	9:43:47 AM	Helium MFC set to  100.000000
5/7/2011	9:43:47 AM	H2 MFC set to  0.000000
5/7/2011	9:43:47 AM	BCl3 MFC set to  0.000000
5/7/2011	9:43:47 AM	PHl3 MFC set to  0.000000
5/7/2011	9:43:47 AM	SiCl4 MFC set to  0.000000
5/7/2011	9:43:47 AM	Bypass solenoid MFC set to  0.000000
5/7/2011	9:43:47 AM	Tube furnace set to 0
5/7/2011	9:44:47 AM	Helium valve closed
5/7/2011	9:44:47 AM	H2 valve closed
5/7/2011	9:44:47 AM	BCl3 valve closed
5/7/2011	9:44:47 AM	PH3 valve closed
5/7/2011	9:44:47 AM	SiCl4 pre valve closed
5/7/2011	9:44:47 AM	SiCl4 post valve closed
5/7/2011	9:44:47 AM	Bubbler valve closed
5/7/2011	9:44:47 AM	Main Vac valve opened
5/7/2011	9:44:47 AM	Bypass valve opened
5/7/2011	9:44:47 AM	Helium MFC set to  0.000000
5/7/2011	9:44:47 AM	H2 MFC set to  0.000000
5/7/2011	9:44:47 AM	BCl3 MFC set to  0.000000
5/7/2011	9:44:47 AM	PHl3 MFC set to  0.000000
5/7/2011	9:44:47 AM	SiCl4 MFC set to  0.000000
5/7/2011	9:44:47 AM	Bypass solenoid MFC set to  0.000000
5/7/2011	9:44:47 AM	Tube furnace set to 0
5/7/2011	9:45:47 AM	H2 valve closed
5/7/2011	9:45:47 AM	BCl3 valve closed
5/7/2011	9:45:47 AM	PH3 valve closed
5/7/2011	9:45:47 AM	SiCl4 pre valve closed
5/7/2011	9:45:47 AM	SiCl4 post valve closed
5/7/2011	9:45:47 AM	Bubbler valve closed
5/7/2011	9:45:47 AM	Helium valve opened
5/7/2011	9:45:47 AM	Main Vac valve opened
5/7/2011	9:45:47 AM	Bypass valve opened
5/7/2011	9:45:47 AM	Helium MFC set to  100.000000
5/7/2011	9:45:47 AM	H2 MFC set to  0.000000
5/7/2011	9:45:47 AM	BCl3 MFC set to  0.000000
5/7/2011	9:45:47 AM	PHl3 MFC set to  0.000000
5/7/2011	9:45:47 AM	SiCl4 MFC set to  0.000000
5/7/2011	9:45:47 AM	Bypass solenoid MFC set to  0.000000
5/7/2011	9:45:47 AM	Tube furnace set to 0
5/7/2011	9:46:48 AM	Helium valve closed
5/7/2011	9:46:48 AM	H2 valve closed
5/7/2011	9:46:48 AM	BCl3 valve closed
5/7/2011	9:46:48 AM	PH3 valve closed
5/7/2011	9:46:48 AM	SiCl4 pre valve closed
5/7/2011	9:46:48 AM	SiCl4 post valve closed
5/7/2011	9:46:48 AM	Bubbler valve closed
5/7/2011	9:46:48 AM	Main Vac valve opened
5/7/2011	9:46:48 AM	Bypass valve opened
5/7/2011	9:46:48 AM	Helium MFC set to  0.000000
5/7/2011	9:46:48 AM	H2 MFC set to  0.000000
5/7/2011	9:46:48 AM	BCl3 MFC set to  0.000000
5/7/2011	9:46:48 AM	PHl3 MFC set to  0.000000
5/7/2011	9:46:48 AM	SiCl4 MFC set to  0.000000
5/7/2011	9:46:48 AM	Bypass solenoid MFC set to  0.000000
5/7/2011	9:46:48 AM	Tube furnace set to 0
5/7/2011	9:47:48 AM	H2 valve closed
5/7/2011	9:47:48 AM	BCl3 valve closed
5/7/2011	9:47:48 AM	PH3 valve closed
5/7/2011	9:47:48 AM	SiCl4 pre valve closed
5/7/2011	9:47:48 AM	SiCl4 post valve closed
5/7/2011	9:47:48 AM	Bubbler valve closed
5/7/2011	9:47:48 AM	Helium valve opened
5/7/2011	9:47:48 AM	Main Vac valve opened
5/7/2011	9:47:48 AM	Bypass valve opened
5/7/2011	9:47:48 AM	Helium MFC set to  100.000000
5/7/2011	9:47:48 AM	H2 MFC set to  0.000000
5/7/2011	9:47:48 AM	BCl3 MFC set to  0.000000
5/7/2011	9:47:48 AM	PHl3 MFC set to  0.000000
5/7/2011	9:47:48 AM	SiCl4 MFC set to  0.000000
5/7/2011	9:47:48 AM	Bypass solenoid MFC set to  0.000000
5/7/2011	9:47:48 AM	Tube furnace set to 0
5/7/2011	9:48:48 AM	Helium valve closed
5/7/2011	9:48:48 AM	H2 valve closed
5/7/2011	9:48:48 AM	BCl3 valve closed
5/7/2011	9:48:48 AM	PH3 valve closed
5/7/2011	9:48:48 AM	SiCl4 pre valve closed
5/7/2011	9:48:48 AM	SiCl4 post valve closed
5/7/2011	9:48:48 AM	Bubbler valve closed
5/7/2011	9:48:48 AM	Main Vac valve opened
5/7/2011	9:48:48 AM	Bypass valve opened
5/7/2011	9:48:48 AM	Helium MFC set to  0.000000
5/7/2011	9:48:48 AM	H2 MFC set to  0.000000
5/7/2011	9:48:48 AM	BCl3 MFC set to  0.000000
5/7/2011	9:48:48 AM	PHl3 MFC set to  0.000000
5/7/2011	9:48:48 AM	SiCl4 MFC set to  0.000000
5/7/2011	9:48:48 AM	Bypass solenoid MFC set to  0.000000
5/7/2011	9:48:48 AM	Tube furnace set to 0
5/7/2011	9:49:48 AM	H2 valve closed
5/7/2011	9:49:48 AM	BCl3 valve closed
5/7/2011	9:49:48 AM	PH3 valve closed
5/7/2011	9:49:48 AM	SiCl4 pre valve closed
5/7/2011	9:49:48 AM	SiCl4 post valve closed
5/7/2011	9:49:48 AM	Bubbler valve closed
5/7/2011	9:49:48 AM	Helium valve opened
5/7/2011	9:49:48 AM	Main Vac valve opened
5/7/2011	9:49:48 AM	Bypass valve opened
5/7/2011	9:49:48 AM	Helium MFC set to  100.000000
5/7/2011	9:49:48 AM	H2 MFC set to  0.000000
5/7/2011	9:49:48 AM	BCl3 MFC set to  0.000000
5/7/2011	9:49:48 AM	PHl3 MFC set to  0.000000
5/7/2011	9:49:48 AM	SiCl4 MFC set to  0.000000
5/7/2011	9:49:48 AM	Bypass solenoid MFC set to  0.000000
5/7/2011	9:49:48 AM	Tube furnace set to 0
5/7/2011	9:50:48 AM	Helium valve closed
5/7/2011	9:50:48 AM	H2 valve closed
5/7/2011	9:50:48 AM	BCl3 valve closed
5/7/2011	9:50:48 AM	PH3 valve closed
5/7/2011	9:50:48 AM	SiCl4 pre valve closed
5/7/2011	9:50:48 AM	SiCl4 post valve closed
5/7/2011	9:50:48 AM	Bubbler valve closed
5/7/2011	9:50:48 AM	Main Vac valve opened
5/7/2011	9:50:48 AM	Bypass valve opened
5/7/2011	9:50:48 AM	Helium MFC set to  0.000000
5/7/2011	9:50:48 AM	H2 MFC set to  0.000000
5/7/2011	9:50:48 AM	BCl3 MFC set to  0.000000
5/7/2011	9:50:48 AM	PHl3 MFC set to  0.000000
5/7/2011	9:50:48 AM	SiCl4 MFC set to  0.000000
5/7/2011	9:50:48 AM	Bypass solenoid MFC set to  0.000000
5/7/2011	9:50:49 AM	Tube furnace set to 0
5/7/2011	9:50:50 AM	Run finished at 9:50 AM
5/7/2011	9:50:50 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/7/2011	9:51:37 AM	Recipe started at 9:51 AM
5/7/2011	9:51:37 AM	Helium valve closed
5/7/2011	9:51:37 AM	BCl3 valve closed
5/7/2011	9:51:37 AM	PH3 valve closed
5/7/2011	9:51:37 AM	SiCl4 pre valve closed
5/7/2011	9:51:37 AM	SiCl4 post valve closed
5/7/2011	9:51:37 AM	Main Vac valve closed
5/7/2011	9:51:37 AM	Bypass valve closed
5/7/2011	9:51:37 AM	Bubbler valve closed
5/7/2011	9:51:37 AM	H2 valve opened
5/7/2011	9:51:37 AM	Helium MFC set to  0.000000
5/7/2011	9:51:37 AM	H2 MFC set to  500.000000
5/7/2011	9:51:37 AM	BCl3 MFC set to  0.000000
5/7/2011	9:51:37 AM	PHl3 MFC set to  0.000000
5/7/2011	9:51:37 AM	SiCl4 MFC set to  0.000000
5/7/2011	9:51:37 AM	Bypass solenoid MFC set to  0.000000
5/7/2011	9:51:37 AM	Tube furnace set to 0
5/7/2011	9:51:50 AM	Run aborted at 9:51 AM
5/7/2011	9:51:50 AM	Helium valve closed
5/7/2011	9:51:50 AM	H2 valve closed
5/7/2011	9:51:50 AM	BCl3 valve closed
5/7/2011	9:51:50 AM	PH3 valve closed
5/7/2011	9:51:50 AM	SiCl4 pre valve closed
5/7/2011	9:51:50 AM	SiCl4 post valve closed
5/7/2011	9:51:50 AM	Bypass valve closed
5/7/2011	9:51:50 AM	Main Vac valve closed
5/7/2011	9:51:50 AM	Bubbler valve closed
5/7/2011	9:51:50 AM	Helium MFC set to  0.000000
5/7/2011	9:51:50 AM	H2 MFC set to  0.000000
5/7/2011	9:51:50 AM	BCl3 MFC set to  0.000000
5/7/2011	9:51:50 AM	PHl3 MFC set to  0.000000
5/7/2011	9:51:50 AM	SiCl4 MFC set to  0.000000
5/7/2011	9:51:50 AM	Tube furnace set to 0
5/7/2011	9:51:52 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/7/2011	9:51:53 AM	Recipe started at 9:51 AM
5/7/2011	9:51:53 AM	Helium valve closed
5/7/2011	9:51:53 AM	H2 valve closed
5/7/2011	9:51:53 AM	BCl3 valve closed
5/7/2011	9:51:53 AM	PH3 valve closed
5/7/2011	9:51:53 AM	SiCl4 pre valve closed
5/7/2011	9:51:53 AM	SiCl4 post valve closed
5/7/2011	9:51:53 AM	Main Vac valve closed
5/7/2011	9:51:53 AM	Bubbler valve closed
5/7/2011	9:51:53 AM	Bypass valve opened
5/7/2011	9:51:53 AM	Helium MFC set to  0.000000
5/7/2011	9:51:53 AM	H2 MFC set to  0.000000
5/7/2011	9:51:53 AM	BCl3 MFC set to  0.000000
5/7/2011	9:51:53 AM	PHl3 MFC set to  0.000000
5/7/2011	9:51:53 AM	SiCl4 MFC set to  0.000000
5/7/2011	9:51:53 AM	Bypass solenoid MFC set to  0.000000
5/7/2011	9:51:53 AM	Tube furnace set to 0
5/7/2011	9:51:59 AM	Helium valve closed
5/7/2011	9:51:59 AM	H2 valve closed
5/7/2011	9:51:59 AM	BCl3 valve closed
5/7/2011	9:51:59 AM	PH3 valve closed
5/7/2011	9:51:59 AM	SiCl4 pre valve closed
5/7/2011	9:51:59 AM	SiCl4 post valve closed
5/7/2011	9:51:59 AM	Bubbler valve closed
5/7/2011	9:51:59 AM	Main Vac valve opened
5/7/2011	9:51:59 AM	Bypass valve opened
5/7/2011	9:51:59 AM	Helium MFC set to  0.000000
5/7/2011	9:51:59 AM	H2 MFC set to  0.000000
5/7/2011	9:51:59 AM	BCl3 MFC set to  0.000000
5/7/2011	9:51:59 AM	PHl3 MFC set to  0.000000
5/7/2011	9:51:59 AM	SiCl4 MFC set to  0.000000
5/7/2011	9:51:59 AM	Bypass solenoid MFC set to  0.000000
5/7/2011	9:52:00 AM	Tube furnace set to 0
5/7/2011	9:52:00 AM	Run finished at 9:52 AM
5/7/2011	9:52:00 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/7/2011	9:52:48 AM	Recipe started at 9:52 AM
5/7/2011	9:52:48 AM	Helium valve closed
5/7/2011	9:52:48 AM	BCl3 valve closed
5/7/2011	9:52:48 AM	PH3 valve closed
5/7/2011	9:52:48 AM	SiCl4 pre valve closed
5/7/2011	9:52:48 AM	SiCl4 post valve closed
5/7/2011	9:52:48 AM	Main Vac valve closed
5/7/2011	9:52:48 AM	Bypass valve closed
5/7/2011	9:52:48 AM	Bubbler valve closed
5/7/2011	9:52:48 AM	H2 valve opened
5/7/2011	9:52:48 AM	Helium MFC set to  0.000000
5/7/2011	9:52:48 AM	H2 MFC set to  500.000000
5/7/2011	9:52:48 AM	BCl3 MFC set to  0.000000
5/7/2011	9:52:48 AM	PHl3 MFC set to  0.000000
5/7/2011	9:52:48 AM	SiCl4 MFC set to  0.000000
5/7/2011	9:52:48 AM	Bypass solenoid MFC set to  0.000000
5/7/2011	9:52:48 AM	Tube furnace set to 0
5/7/2011	9:54:11 AM	Helium valve closed
5/7/2011	9:54:11 AM	BCl3 valve closed
5/7/2011	9:54:11 AM	PH3 valve closed
5/7/2011	9:54:11 AM	SiCl4 pre valve closed
5/7/2011	9:54:11 AM	SiCl4 post valve closed
5/7/2011	9:54:11 AM	Main Vac valve closed
5/7/2011	9:54:11 AM	Bypass valve closed
5/7/2011	9:54:11 AM	H2 valve opened
5/7/2011	9:54:11 AM	Bubbler valve opened
5/7/2011	9:54:11 AM	Helium MFC set to  0.000000
5/7/2011	9:54:11 AM	H2 MFC set to  500.000000
5/7/2011	9:54:11 AM	BCl3 MFC set to  0.000000
5/7/2011	9:54:11 AM	PHl3 MFC set to  0.000000
5/7/2011	9:54:11 AM	SiCl4 MFC set to  0.000000
5/7/2011	9:54:11 AM	Bypass solenoid MFC set to  0.000000
5/7/2011	9:54:12 AM	Tube furnace set to 1000
5/7/2011	10:19:12 AM	Helium valve closed
5/7/2011	10:19:12 AM	BCl3 valve closed
5/7/2011	10:19:12 AM	PH3 valve closed
5/7/2011	10:19:12 AM	Main Vac valve closed
5/7/2011	10:19:12 AM	Bypass valve closed
5/7/2011	10:19:12 AM	H2 valve opened
5/7/2011	10:19:12 AM	SiCl4 pre valve opened
5/7/2011	10:19:12 AM	SiCl4 post valve opened
5/7/2011	10:19:12 AM	Bubbler valve opened
5/7/2011	10:19:12 AM	Helium MFC set to  0.000000
5/7/2011	10:19:12 AM	H2 MFC set to  500.000000
5/7/2011	10:19:12 AM	BCl3 MFC set to  0.000000
5/7/2011	10:19:12 AM	PHl3 MFC set to  0.000000
5/7/2011	10:19:12 AM	SiCl4 MFC set to  75.000000
5/7/2011	10:19:12 AM	Bypass solenoid MFC set to  0.000000
5/7/2011	10:19:12 AM	Tube furnace set to 1000
5/7/2011	10:39:12 AM	H2 valve closed
5/7/2011	10:39:12 AM	BCl3 valve closed
5/7/2011	10:39:12 AM	PH3 valve closed
5/7/2011	10:39:12 AM	SiCl4 pre valve closed
5/7/2011	10:39:12 AM	SiCl4 post valve closed
5/7/2011	10:39:12 AM	Main Vac valve closed
5/7/2011	10:39:12 AM	Bypass valve closed
5/7/2011	10:39:12 AM	Helium valve opened
5/7/2011	10:39:12 AM	Bubbler valve opened
5/7/2011	10:39:12 AM	Helium MFC set to  500.000000
5/7/2011	10:39:12 AM	H2 MFC set to  0.000000
5/7/2011	10:39:12 AM	BCl3 MFC set to  0.000000
5/7/2011	10:39:12 AM	PHl3 MFC set to  0.000000
5/7/2011	10:39:12 AM	SiCl4 MFC set to  0.000000
5/7/2011	10:39:12 AM	Bypass solenoid MFC set to  0.000000
5/7/2011	10:39:12 AM	Tube furnace set to 0
5/7/2011	10:59:12 AM	Helium valve closed
5/7/2011	10:59:12 AM	H2 valve closed
5/7/2011	10:59:12 AM	BCl3 valve closed
5/7/2011	10:59:12 AM	PH3 valve closed
5/7/2011	10:59:12 AM	SiCl4 pre valve closed
5/7/2011	10:59:12 AM	SiCl4 post valve closed
5/7/2011	10:59:12 AM	Main Vac valve closed
5/7/2011	10:59:12 AM	Bypass valve closed
5/7/2011	10:59:12 AM	Bubbler valve closed
5/7/2011	10:59:12 AM	Helium MFC set to  0.000000
5/7/2011	10:59:12 AM	H2 MFC set to  0.000000
5/7/2011	10:59:12 AM	BCl3 MFC set to  0.000000
5/7/2011	10:59:12 AM	PHl3 MFC set to  0.000000
5/7/2011	10:59:12 AM	SiCl4 MFC set to  0.000000
5/7/2011	10:59:12 AM	Bypass solenoid MFC set to  0.000000
5/7/2011	10:59:12 AM	Tube furnace set to 0
5/7/2011	10:59:12 AM	Run finished at 10:59 AM
5/7/2011	11:17:00 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/7/2011	11:17:01 AM	Recipe started at 11:17 AM
5/7/2011	11:17:01 AM	Helium valve closed
5/7/2011	11:17:01 AM	H2 valve closed
5/7/2011	11:17:01 AM	BCl3 valve closed
5/7/2011	11:17:01 AM	PH3 valve closed
5/7/2011	11:17:01 AM	SiCl4 pre valve closed
5/7/2011	11:17:01 AM	SiCl4 post valve closed
5/7/2011	11:17:01 AM	Main Vac valve closed
5/7/2011	11:17:01 AM	Bubbler valve closed
5/7/2011	11:17:01 AM	Bypass valve opened
5/7/2011	11:17:01 AM	Helium MFC set to  0.000000
5/7/2011	11:17:01 AM	H2 MFC set to  0.000000
5/7/2011	11:17:01 AM	BCl3 MFC set to  0.000000
5/7/2011	11:17:01 AM	PHl3 MFC set to  0.000000
5/7/2011	11:17:01 AM	SiCl4 MFC set to  0.000000
5/7/2011	11:17:01 AM	Bypass solenoid MFC set to  0.000000
5/7/2011	11:17:01 AM	Tube furnace set to 0
5/7/2011	11:17:24 AM	Helium valve closed
5/7/2011	11:17:24 AM	H2 valve closed
5/7/2011	11:17:24 AM	BCl3 valve closed
5/7/2011	11:17:24 AM	PH3 valve closed
5/7/2011	11:17:24 AM	SiCl4 pre valve closed
5/7/2011	11:17:24 AM	SiCl4 post valve closed
5/7/2011	11:17:24 AM	Bubbler valve closed
5/7/2011	11:17:24 AM	Main Vac valve opened
5/7/2011	11:17:24 AM	Bypass valve opened
5/7/2011	11:17:24 AM	Helium MFC set to  0.000000
5/7/2011	11:17:24 AM	H2 MFC set to  0.000000
5/7/2011	11:17:24 AM	BCl3 MFC set to  0.000000
5/7/2011	11:17:24 AM	PHl3 MFC set to  0.000000
5/7/2011	11:17:24 AM	SiCl4 MFC set to  0.000000
5/7/2011	11:17:24 AM	Bypass solenoid MFC set to  0.000000
5/7/2011	11:17:24 AM	Tube furnace set to 0
5/7/2011	11:17:24 AM	Run finished at 11:17 AM
5/7/2011	11:17:24 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/7/2011	11:17:28 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/7/2011	11:17:29 AM	Recipe started at 11:17 AM
5/7/2011	11:17:29 AM	H2 valve closed
5/7/2011	11:17:29 AM	BCl3 valve closed
5/7/2011	11:17:29 AM	PH3 valve closed
5/7/2011	11:17:29 AM	SiCl4 pre valve closed
5/7/2011	11:17:29 AM	SiCl4 post valve closed
5/7/2011	11:17:29 AM	Main Vac valve closed
5/7/2011	11:17:29 AM	Bypass valve closed
5/7/2011	11:17:29 AM	Bubbler valve closed
5/7/2011	11:17:29 AM	Helium valve opened
5/7/2011	11:17:29 AM	Helium MFC set to  500.000000
5/7/2011	11:17:29 AM	H2 MFC set to  0.000000
5/7/2011	11:17:29 AM	BCl3 MFC set to  0.000000
5/7/2011	11:17:29 AM	PHl3 MFC set to  0.000000
5/7/2011	11:17:29 AM	SiCl4 MFC set to  0.000000
5/7/2011	11:17:29 AM	Bypass solenoid MFC set to  0.000000
5/7/2011	11:17:29 AM	Tube furnace set to 0
5/7/2011	11:18:43 AM	Helium valve closed
5/7/2011	11:18:43 AM	H2 valve closed
5/7/2011	11:18:43 AM	BCl3 valve closed
5/7/2011	11:18:43 AM	PH3 valve closed
5/7/2011	11:18:43 AM	SiCl4 pre valve closed
5/7/2011	11:18:43 AM	SiCl4 post valve closed
5/7/2011	11:18:43 AM	Main Vac valve closed
5/7/2011	11:18:43 AM	Bypass valve closed
5/7/2011	11:18:43 AM	Bubbler valve closed
5/7/2011	11:18:43 AM	Helium MFC set to  0.000000
5/7/2011	11:18:43 AM	H2 MFC set to  0.000000
5/7/2011	11:18:43 AM	BCl3 MFC set to  0.000000
5/7/2011	11:18:43 AM	PHl3 MFC set to  0.000000
5/7/2011	11:18:43 AM	SiCl4 MFC set to  0.000000
5/7/2011	11:18:43 AM	Bypass solenoid MFC set to  0.000000
5/7/2011	11:18:43 AM	Tube furnace set to 0
5/7/2011	11:18:43 AM	Run finished at 11:18 AM
5/7/2011	11:18:43 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/7/2011	11:22:54 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/7/2011	11:22:55 AM	Recipe started at 11:22 AM
5/7/2011	11:22:55 AM	Helium valve closed
5/7/2011	11:22:55 AM	H2 valve closed
5/7/2011	11:22:55 AM	BCl3 valve closed
5/7/2011	11:22:55 AM	PH3 valve closed
5/7/2011	11:22:55 AM	SiCl4 pre valve closed
5/7/2011	11:22:55 AM	SiCl4 post valve closed
5/7/2011	11:22:55 AM	Main Vac valve closed
5/7/2011	11:22:55 AM	Bubbler valve closed
5/7/2011	11:22:55 AM	Bypass valve opened
5/7/2011	11:22:55 AM	Helium MFC set to  0.000000
5/7/2011	11:22:55 AM	H2 MFC set to  0.000000
5/7/2011	11:22:55 AM	BCl3 MFC set to  0.000000
5/7/2011	11:22:55 AM	PHl3 MFC set to  0.000000
5/7/2011	11:22:55 AM	SiCl4 MFC set to  0.000000
5/7/2011	11:22:55 AM	Bypass solenoid MFC set to  0.000000
5/7/2011	11:22:55 AM	Tube furnace set to 0
5/7/2011	11:23:24 AM	Helium valve closed
5/7/2011	11:23:24 AM	H2 valve closed
5/7/2011	11:23:25 AM	BCl3 valve closed
5/7/2011	11:23:25 AM	PH3 valve closed
5/7/2011	11:23:25 AM	SiCl4 pre valve closed
5/7/2011	11:23:25 AM	SiCl4 post valve closed
5/7/2011	11:23:25 AM	Bubbler valve closed
5/7/2011	11:23:25 AM	Main Vac valve opened
5/7/2011	11:23:25 AM	Bypass valve opened
5/7/2011	11:23:25 AM	Helium MFC set to  0.000000
5/7/2011	11:23:25 AM	H2 MFC set to  0.000000
5/7/2011	11:23:25 AM	BCl3 MFC set to  0.000000
5/7/2011	11:23:25 AM	PHl3 MFC set to  0.000000
5/7/2011	11:23:25 AM	SiCl4 MFC set to  0.000000
5/7/2011	11:23:25 AM	Bypass solenoid MFC set to  0.000000
5/7/2011	11:23:25 AM	Tube furnace set to 0
5/7/2011	11:23:25 AM	Run finished at 11:23 AM
5/7/2011	11:23:25 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/7/2011	11:23:35 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/7/2011	11:23:36 AM	Recipe started at 11:23 AM
5/7/2011	11:23:36 AM	Helium valve closed
5/7/2011	11:23:36 AM	H2 valve closed
5/7/2011	11:23:36 AM	BCl3 valve closed
5/7/2011	11:23:36 AM	PH3 valve closed
5/7/2011	11:23:36 AM	SiCl4 pre valve closed
5/7/2011	11:23:36 AM	SiCl4 post valve closed
5/7/2011	11:23:36 AM	Main Vac valve closed
5/7/2011	11:23:36 AM	Bypass valve closed
5/7/2011	11:23:36 AM	Bubbler valve closed
5/7/2011	11:23:36 AM	Helium MFC set to  0.000000
5/7/2011	11:23:36 AM	H2 MFC set to  0.000000
5/7/2011	11:23:36 AM	BCl3 MFC set to  0.000000
5/7/2011	11:23:36 AM	PHl3 MFC set to  0.000000
5/7/2011	11:23:36 AM	SiCl4 MFC set to  0.000000
5/7/2011	11:23:36 AM	Bypass solenoid MFC set to  0.000000
5/7/2011	11:23:36 AM	Tube furnace set to 0
5/7/2011	11:23:36 AM	Run finished at 11:23 AM
5/7/2011	11:23:36 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
